FA-40VEW
FA-2
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There are two standardized models; the FA-2E, a lateral type for a low flow rate, and the FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray system for single wafer processing while the FA-40VEW is suitable for cleaning 200/300 mm wafers.
H-shaped thick bellows are used (Only FA-40VEW). They have excellent resistance to high pressure and a long life to withstand continuous long-time operation. When connected to a special controller, the discharge can be controlled and monitored easily.
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Specifications
| Model |
FA-2 |
FA-40 |
| Max. discharge capacity |
2 L/min |
40 L/min |
| Max. supplied air pressure |
0.4 MPa |
0.4 MPa |
| Max. Air consumption |
50 NL/min |
200 NL/min |
| Max. stroke speed |
150 spm |
80 spm |
| Main materials |
PTFE, PFA |
PTFE, PFA |
| Liquid temp. range |
5 to 100 C deg. |
5 to 100 C deg. |
Note: Max. discharge capacity shows when pumping clear water at 20 C deg. |
• Magnetic drive pumps
• Metering pumps
 & dosing pumps
• Pneumatic drive pumps
• Air pumps
• Gear pumps
• Turbine pumps
• Screw pumps
• Water quality control |
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Catalog (1.71MB)