PDS-105H
PDS-105V
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Substantial saving of resist
The use of a high-torque stepper motor as the drive source results in a consistent discharge volume, unimpeded by filter clogging or viscosity change. A repeatable accuracy (0.3%) of discharge is maintained.
･ Repeated precision: ±0.3% (F.S.)
･ Linearity: ±0.5% (F.S.)
･ Resolution: 0.01 ml or below
Contamination free
The pump portion is of tubephragm structure wetted internals are flat and smooth, with a small dead volume. Because the system hardly has a place that allows liquid resist to dwell, production of particles is prevented.
Usable for a variety of coating processes
Since the discharge velocity can be changed freely in a shot, the system is capable of dealing with a variety of resist coating processes including application of a very small amount or in a very short period of time.
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| | Pump controller PDS-210
A high performance controller. One PDS-210 controller can control a maximum of three PDS pumps. Up to three recipes can be programmed.
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| | Programmable controller PDS-310
This controller is used as an interface with the PDS-230 and is capable of controlling a maximum of two PDS pumps.
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| | Pulse controller PDS-230
This controller operates the PDS pump by generating output pulses corresponding to the length of a signal from the equipment.
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| | Automatic vent unit PDS-410
An air elimination unit comprised of a vacuum-purge system. Air in the system can be extracted in a short period of time without any action required by the operator.
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Pump specifications
| Model |
PDS-105H (Horizontal)
/ PDS-105V (Vertical) |
| Max. discharge capacity |
5 mL/shot * |
| Max. discharge pressure |
0.15 MPa |
| Discharge speed |
0.1 to 4.0 mL/sec |
| Suction speed |
0.1 to 3.0 mL/sec |
| Main materials |
PFA, PTFE, EPDM |
| Liquid temp. range |
15 to 25 C deg. |
| Power supply |
DC24 V |
*The 10 ml/shot type (PDS-110) is also available. Please contact us for details. |
• Magnetic drive pumps
• Metering pumps
 & dosing pumps
• Pneumatic drive pumps
• Air pumps
• Gear pumps
• Turbine pumps
• Screw pumps
• Water quality control |
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Catalog (PDF: 1.1MB)