Product information
- Catalogs and Download
- Product data, catalogs, and instruction manuals can be downloaded from the member site.
※ Membership registration is required.
Max. discharge capacity: 12.0 mL/shot Capable of dispensing highly-viscous photoresist in LED or MEMS manufacturing
※In order to download information materials and catalogues, you need to register a user
account (for free) with us. Membership Registration
Highly accurate repeatability of ±0.5% (F.S. ) is possible thanks to a high performance stepping motor. Excess use of photoresist is eliminated, and uniform application of liquid is assured.
Rated for viscosities up to 10,000mPa·s used in manufac tur ing processes including LED and MEMS. And also for filling electrolysis solution.
A built-in pressure sensor detects excessive pressure rise in the pump head for the prevention of accident caused by over pressurization.
Max. discharge capacity | 12.0 mL/shot |
---|---|
Discharge speed | 0.5 – 2.0 mL/sec |
Suction speed | 0.3 – 2.0 mL/sec |
Max. discharge pressure | 1.0 MPa |
Repeatability | ±0.5 % or below (F.S.) |
Main materials | PTFE |
Allowable viscosity range | 100 – 10,000 mPa·s |
Kindly use this inquiry form for placing an order or sending your inquiry
about our fluid control devices including chemical pumps.
HomeP