Features of FW / FW-H series

  • The use of a thick bellows increases the pumps discharge pressure rating to as high as 0.45 MPa maximum. In addition, the bellows have three to four times longer service life than a diaphragm. This results lower case a substantially reduced downtime.
  • This design is commonly used for chemical feed, the FW series can be used in high pressure and medium temperature (10 – 100°C) cleaning systems as well as for the circulation of CMP slurry liquids. The FW-H with its higher temperature capability (10 – 180°C) is ideal for chemical circulation in wafer cleaning applications.
  • Easily adaptable fitting capability, the internally formed PFA suction and discharge tubes prevent the accumulation of particles.
  • When connected to a special controller, the discharge can be monitored and controlled easily.
  • The pump utilizes a built in proximity sensor driven control system to switch an external air solenoid valve. Leak sensors are also included as standard equipment.

Specifications

Model FW FW-H
Max. discharge capacity range 20 – 80 L/min 20 – 40 L/min
Air supply pressure range 0.2 – 0.5 MPa 0.15 – 0.5 MPa
Liquid temperature range 10 – 100˚C 10 – 180˚C
Max. air consumption 820 NL/min 480 NL/min
Max. stroke speed Note 120 spm
Main materials PTFE, PFA

Note: Max. discharge capacity shows when pumping clear water at  20˚C.

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