Pneumatic drive low pulsation bellows pumps FLP series

Max. discharge capacity: 92 L/min

The FLP series reduces discharge pulsation without the use of a separate dampener, reducing the total cost of installation.

Pneumatic drive bellows pumps FLP series

 


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Features of FLP series

Low Pulsation

The position of the bellows is constantly monitored via the laser displacement sensors and proximity switches. The pump itself reduces pulsation without any additional equipment because the controller determines the appropriate amount of phase shift required to move the bellows left and right via an electromagnetic valve.

Reduced Sensors

External sensors are not needed since the pumps phase control of the bellows depends entirely on signals from the laser and proximity sensors included in the design.

High Pressure

The optimum bellows movement increases sustained pressure capability, maintaining stable discharge capacity and pressure under frequent load changes, especially in single wafer processing.

Safe Design

A welded bellows structure prevents liquid leakage. Even if the bellows is damaged, the built-in leak sensors will detect and provide feedback to ensure safe operation.

Specifications of FLP-60W

Max. discharge capacity

50 L/min

Liquid temperature range

5 to 100°C

101 to 150°C

151 to 180°C

Max. supply air pressure

0.5 MPa

0.4 MPa

0.3 MPa
Max. viscosity

50 mPa·s

Pump connection size

φ25mm × φ22mm (PFA tube)

• The max. discharge capacity is based on pumping clean water at an ambient temperature and the supply air pressure of 0.2 MPa.

Specifications of FLP-75W

Max. discharge capacity

92 L/min

Liquid temperature range

5 to 100°C

101 to 150°C

151 to 180°C

Max. supply air pressure

0.5 MPa

0.4 MPa

0.3 MPa
Max. viscosity

50 mPa·s

Liquid line connection bore
(IN)

φ31.8 × φ28.0mm (PFA)
with a Super 300 type 1-1/4 inch union nut and sleeve

Liquid line connection bore
(OUT)

φ25.4 × φ22.2mm (PFA)
with a Super 300 type 1 inch union nut and sleeve

• The max. discharge capacity is based on pumping clean water at an ambient temperature and the supply air pressure of 0.3 MPa.

Pump controller LPC-1

Specifications

  • Power voltage: 24VDC (-5% to +10%)
  • Max. power consumption (LPC-1): 0.11A
  • Max. power consumption (24VDC signal): 1.8A

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