Pneumatic drive bellows pumps FS-H series

Features of FS-H series

Small and Lightweight

Low Cost

High Temperature Transfer

• Using a higher stroke rate (240 spm maximum) has resulted in a reduction in size, weight and cost.
  Note: The maximum stroke rates are dependent on model and application; please refer to the specification table for details.
• All liquid contact components are constructed of high purity fluororesin materials. The exterior of the units are also coated in fluororesin so that no metallic components are exposed. FS-H pumps also utilize our own shaft seal design resulting in a marked reduction in particle generation.
• The pumps are rated for liquid temperatures ranging from 5 – 180°C with discharge pressure to 0.45 MPa. Applications include wet process circulation and CMP processes, as well as chemical distribution feed systems.
• The pump uses a proximity sensor drive system which opens/closes an external air solenoid valve providing easy performance control capabilities that are compatible with a variety of controller options.

Specifications

*1 Max. discharge capacity shows when pumping clear water at 20°C.
*2 180 spm maximum with feed air pressures between 0.3 and 0.5 MPa.