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Max. discharge capacity: 8 mL/shot Excellent performance for strong acid and alkali replenishment in semiconductor manufacturing
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Model | CFD-1T-B | CFD-8T-B |
---|---|---|
Max. discharge capacity | 1 mL/shotNote 1 | 8 mL/shotNote 2 |
Max. discharge pressure | 0.05 MPa | |
Max. stroke speed | 30 spm | |
Main materials | PTFE, PFA, PCTFE | |
Liquid temperature range | 20 – 60°C |
Note 1: Factory default setting. The discharge capacity can be changed within 0.4 to 2.7 mL/shot.
Note 2: Factory default setting. The discharge capacity can be changed from 7 to 10 mL/shot.
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