Max. discharge capacity: 5.0 mL/shot
Discharge precision of ±0.3% (F.S.)
Substantial Saving of Resist
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The use of a high-torque stepper motor as the drive source results in a consistent discharge volume, unimpeded by filter clogging or viscosity change. A repeatable accuracy (0.3%) of discharge is maintained.
• Discharge precision: ±0.3% (F.S.)
• Linearity: ±0.5% (F.S.)
• Resolution: 0.01 mL
The pump portion is of tubephragm structure wetted internals are flat and smooth, with a small dead volume. Because the system hardly has a place that allows liquid resist to dwell, production of particles is prevented.
Since the discharge velocity can be changed freely in a shot, the system is capable of dealing with a variety of resist coating processes including application of a very small amount or in a very short period of time.
A discharge amount and a discharge time can be set only by entering values in the controller. It can save operator’s time and labor and reduce downtime.
| Max. discharge capacity | 5.0 mL/shot |
|---|---|
| Discharge speed | 0.1 – 4.0 mL/sec |
| Suction speed | 0.1 – 3.0 mL/sec |
| Max. discharge pressure | 0.15 MPa |
| Discharge precision | ±0.3% (F.S.) |
| Main materials | PFA, PTFE |
| Max. liquid viscosity | 200 mPa·s |
• Above specification may changed by installation, handling liquid, etc. For detail, please contact us.
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