Features of PDS-H115

High repeatability of ±0.5% (F.S.)
Highly accurate repeatability of ±0.5% (F.S. ) is possible thanks to a high performance stepping motor. Excess use of photoresist is eliminated, and uniform application of liquid is assured.
Suitable for highly-viscous photoresist in LED and MEMS production
Rated for viscosities up to 10,000mPa·s used in manufac tur ing processes including LED and MEMS. And also for filling electrolysis solution.
Safety design with a built-in pressure sensor
A built-in pressure sensor detects excessive pressure rise in the pump head for the prevention of accident caused by over pressurization.


Max. discharge capacity 12.0 mL/shot
Discharge speed 0.5 – 2.0 mL/sec
Suction speed 0.3 – 2.0 mL/sec
Max. discharge pressure 1.0 MPa
Repeatability ±0.5 % or below (F.S.)
Main materials PTFE
Allowable viscosity range 100 – 10,000 mPa·s

Product information

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