Features of FA series

  • There are two standard models available In the FA series; the FA-2E, a horizontal type for lower flow requirements and the FA-40VEW, a vertical type for a higher flow rates. A typical application for the FA-2E is in a spray system for single wafer processing while the FA-40VEW is suitable for batch cleaning of 200/300mm wafers.
  • The FA-40VEW is designed for a long service life and uses a robust bellows design suitable for continuous operation at higher discharge pressures.
  • Discharge rates can be easily monitored and controlled when used with a dedicated controller.
  • The pump utilizes a built in proximity sensor driven control system to switch an external air solenoid valve. Leak sensors are also included as standard equipment.

Specifications

Model FA-2E-1 FA-40VEW
Max. discharge capacity 2 L/min 40 L/min
Air supply pressure range 0.2 – 0.4 MPa 0.1 – 0.4 MPa
Liquid temperature range 5 – 100˚C 5 – 100˚C
Max. air consumption 50 NL/min 200 NL/min
Max. stroke speed 150 spm 80 spm
Main materials PTFE, PFA
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Pumps Pneumatic drive bellows pumps

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