Pneumatic drive bellows pumps FA series

Max. discharge capacity range: 2 to 40 L/min


Two models for circulating medium temperature liquid

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Features of FA series

There are two standardized models; the FA-2E, a lateral type for a low flow rate, and the FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray system for single wafer processing while the FA-40VEW is suitable for cleaning 200/300 mm wafers.

H-shaped thick bellows are used (Only FA-40VEW). They have excellent resistance to high pressure and a long life to withstand continuous long-time operation. When connected to a special controller, the discharge can be controlled and monitored easily.


Model FA-2 FA-40
Max. discharge capacity 2 L/min 40 L/min
Max. supplied air pressure 0.4 MPa 0.4 MPa
Max. air consumption 50 NL/min 200 NL/min

Max. stroke speed

150 spm

80 spm

Main materials



Liquid temperature range

5 to 100˚C

5 to 100˚C

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