Features of FA series

There are two standardized models; the FA-2E, a lateral type for a low flow rate, and the FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray system for single wafer processing while the FA-40VEW is suitable for cleaning 200/300 mm wafers.
H-shaped thick bellows are used (Only FA-40VEW). They have excellent resistance to high pressure and a long life to withstand continuous long-time operation. When connected to a special controller, the discharge can be controlled and monitored easily.


Model FA-2E-1 FA-40VEW
Max. discharge capacity 2 L/min 40 L/min
Max. supplied air pressure 0.2 – 0.4 MPa 0.1 – 0.4 MPa
Max. air consumption 50 NL/min 200 NL/min
Max. stroke speed 150 spm 80 spm
Main materials PTFE, PFA
Liquid temperature range 5 – 100℃

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