Pneumatic drive bellows pumps FS-100HT2

Max. discharge capacity: 100 L/min

Pneumatic drive bellows pumps FS series

High temperature liquid delivery at 100L/min enhances cleaning efficiency



Product inquiry

Features of FS-100HT2

Enhanced cleaning efficiency

Cleaning efficiency such as the removal of particles and metal contamination on wafers is improved as the circulation flow rate is increased. Cleaning times resulting from increased number of processing lines will also be reduced due to higher circulation rate.

Contamination-free

In addition to the use of fluoroplastic wet ends (PTFE and PFA), a fluorine coating on the pump’s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing.

Reduced installation area

In addition to the use of fluoroplastic wet ends (PTFE and PFA), a fluorine coating on the pump’s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing.

Weight saving

Optimization of design has resultind in reduced weight of about 15% of our existing 80-100L models making installation and replacement work easier.

Specifications

Max. discharge capacity

100 L/min

Max. supplied air pressure

0.5 MPa

Max. stroke speed

120 spm

Main materials

PTFE, PFA

Liquid temperature range

10 to 180˚C

Product inquiry