Pneumatic drive bellows pumps FS-N series

Max. discharge capacity range: 80 to 100 L/min

Pneumatic drive bellows pumps FS series

A small, lightweight and low-cost pump series has been realized owing to an increased stroke speed

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Features of FS-N series

High stroke speed

The pump's fast stroke speed(Max. 200spm:FS-80N) allows compactness, light weight and low cost while enabling high flow & pressure capabilities.


All wet ends are made of fluororesin to give contamination-free construction. Our unique shaft seal also dramatically reduces particle generation (Patent-protected: FS-80N).

High flow & pressure capabilities

The maximum supply air pressure of 0.7MPa meets not only the demand for high flow & pressure capabilities in chemical supply processes but also requirements in cleaning/CMP processes.

Sensor drive

Built-in proximity sensors open/close the solenoid valve. Flow rate control can be assured and facilitated when they are used with our controllers.


Max. discharge capacity range

80 to 100 L/min

Max. supplied air pressure

0.7 MPa

Max. air consumption

1495 NL/min

Max. stroke speed

200 spm (FS-80N)

Main materials


Liquid temperature range

5 to 60˚C

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