Features of FS-N series

High stroke speed
The pump’s fast stroke speed (Max. 200spm: FS-80N) allows compactness, light weight and low cost while enabling high flow & pressure capabilities.
All wet ends are made of fluororesin to give contamination-free construction. Our unique shaft seal also dramatically reduces particle generation (Patent-protected: FS-80N).
High flow & pressure capabilities
The maximum supply air pressure of 0.7MPa meets not only the demand for high flow & pressure capabilities in chemical supply processes but also requirements in cleaning/CMP processes.
Sensor drive
Built-in proximity sensors open/close the solenoid valve. Flow rate control can be assured and facilitated when they are used with our controllers.


Max. discharge capacity range 80 – 100 L/min
Max. supplied air pressure 0.2 – 0.7 MPa
Max. air consumption 1495 NL/min
Max. stroke speed 200 spm (FS-80N)
Main materials PTFE, PFA
Liquid temperature range 5 – 60˚C

Product information

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