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Max. discharge capacity: 92 L/min Low pulsation realized without damper contributes to total cost reduction
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The unique drive mechanism of the system determines and maintains optimum movement of the bellows and supply-air switching to give minimum discharge pulsation.
The pump works without the use of a dampener, saving space inside equipment & installation costs such as fluoroplastic joints. The total weight/size of the equipment is also minimized.
Reduced air consumption up to 30% compared to our previous models is achieved with no reduction of pump performance.
The optimum bellows movement improves pressure sustaining capability to maintain stable discharge capacity and pressure under frequent load change, especially in single wafer processing.
Max. discharge capacity* | 50 L/min | ||
---|---|---|---|
Liquid temperature range | 5 – 100°C | 101 – 150°C | 151 – 180°C |
Max. supply air pressure | 0.5 MPa | 0.4 MPa | 0.3 MPa |
Max. stroke rate | 160 spm | ||
Max. air consumption | 464 NL/min | ||
Max. viscosity | 50 mPa·s | ||
Main materials | PTFE, PFA | ||
Liquid line connection bore | ⌀25 × ⌀22 mm tube |
*The max. discharge capacity is based on pumping clean water at an ambient temperature and the supply air pressure of FLP-60W: 0.2 MPa.
Max. discharge capacity* | 92 L/min | ||
---|---|---|---|
Liquid temperature range | 5 – 100°C | 101 – 150°C | 151 – 180°C |
Max. supply air pressure | 0.5 MPa | 0.4 MPa | 0.3 MPa |
Max. stroke rate | 150 spm | ||
Max. air consumption | 647 NL/min | ||
Max. viscosity | 50 mPa·s | ||
Main materials | PTFE, PFA | ||
Liquid line connection bore (IN) |
⌀31.8 × ⌀28.0 mm (PFA) 1-1/4 inches union nut and sleeve (SUPER 300-type PILLAR FITTING manufactured by Nippon Pillar Packaging Co., Ltd.) |
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Liquid line connection bore (OUT) |
⌀25.4 × ⌀22.2 mm (PFA) 1 inch union nut and sleeve (SUPER 300-type PILLAR FITTING manufactured by Nippon Pillar Packaging Co., Ltd.) |
*The max. discharge capacity is based on pumping clean water at an ambient temperature and the supply air pressure of FLP-75W: 0.3 MPa.
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