Features of FLP series

Low Pulsation
The position of the bellows is constantly monitored via the laser displacement sensors and proximity switches. The pump itself reduces pulsation without any additional equipment because the controller determines the appropriate amount of phase shift required to move the bellows left and right via an electromagnetic valve.
Reduced Sensors
External sensors are not needed since the pumps phase control of the bellows depends entirely on signals from the laser and proximity sensors included in the design.
High Pressure
The optimum bellows movement increases sustained pressure capability, maintaining stable discharge capacity and pressure under frequent load changes, especially in single wafer processing.
Safe Design
A welded bellows structure prevents liquid leakage. Even if the bellows is damaged, the built-in leak sensors will detect and provide feedback to ensure safe operation.

Specifications of FLP-60W

Max. discharge capacityNote1 50 L/min
Liquid temperature range 5  –  100°C 101 – 150°C 151 – 180°C
Max. supply air pressure 0.5 MPa 0.4 MPa 0.3 MPa
Max. viscosity 50 mPa·s
Pump connection size φ25mm × φ22mm (tube)

Note1: The max. discharge capacity is based on pumping clean water at an ambient temperature and the supply air pressure of FLP-60W: 0.2MPa.

Specifications of FLP-75W

Max. discharge capacityNote1 92 L/min
Liquid temperature range 5  – 100°C 101 – 150°C 151 – 180°C
Max. supply air pressure 0.5 MPa 0.4 MPa 0.3 MPa
Max. viscosity 50 mPa·s
Liquid line connection bore
(IN)
Ø31.8×Ø28.0mm (PFA) 1-1/4 inch union nut and sleeve
(SUPER 300-type PILLAR FITTING manufactured by Nippon Pillar Packaging Co., Ltd.)
Liquid line connection bore
(OUT)
Ø25.4×Ø22.2mm (PFA) 1″ inch union nut and sleeve
(SUPER 300-type PILLAR FITTING manufactured by Nippon Pillar Packaging Co., Ltd.)

Note1: The max. discharge capacity is based on pumping clean water at an ambient temperature and the supply air pressure of FLP-75W: 0.3MPa.

Pump controller LPC-1

Specifications
Power voltage: 24VDC (-5%  –  +10%)
Max. power consumption (LPC-1): 0.11A
Max. power consumption (24VDC signal): 1.8A

Product information

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