Features of FLP series
The unique drive mechanism of the system determines and maintains optimum movement of the bellows and supply-air switching to give minimum discharge pulsation. (PAT.)
Reduction of Air Consumption
Reduced air consumption up to 30% compared to our previous models is achieved with no reduction of pump performance.
High Sustained Pressure Capability
The optimum bellows movement improves pressure sustaining capability to maintain stable discharge capacity and pressure under frequent load change, especially in single wafer processing.
Elimination of a Dampener
The pump works without the use of a dampener, saving space inside equipment & installation costs such as fluoroplastic joints. The total weight/size of the equipment is also minimized.
Specifications of FLP-60W
| Max. discharge capacityNote |
50 L/min |
| Liquid temperature range |
5 – 100°C |
101 – 150°C |
151 – 180°C |
| Max. supply air pressure |
0.5 MPa |
0.4 MPa |
0.3 MPa |
| Max. viscosity |
50 mPa·s |
| Pump connection size |
φ25mm × φ22mm (tube) |
Note: The max. discharge capacity is based on pumping clean water at an ambient temperature and the supply air pressure of FLP-60W: 0.2MPa.
Specifications of FLP-75W
| Max. discharge capacityNote |
92 L/min |
| Liquid temperature range |
5 – 100°C |
101 – 150°C |
151 – 180°C |
| Max. supply air pressure |
0.5 MPa |
0.4 MPa |
0.3 MPa |
| Max. viscosity |
50 mPa·s |
Liquid line connection bore
(IN) |
Ø31.8×Ø28.0mm (PFA) 1-1/4 inch union nut and sleeve
(SUPER 300-type PILLAR FITTING manufactured by Nippon Pillar Packaging Co., Ltd.) |
Liquid line connection bore
(OUT) |
Ø25.4×Ø22.2mm (PFA) 1″ inch union nut and sleeve
(SUPER 300-type PILLAR FITTING manufactured by Nippon Pillar Packaging Co., Ltd.) |
Note: The max. discharge capacity is based on pumping clean water at an ambient temperature and the supply air pressure of FLP-75W: 0.3MPa.
Pump controller LPC-1
Specifications
- Power voltage: 24VDC (-5% – +10%)
- Max. power consumption: 0.11A
- Alarm: Leak alarm / Time up alarm / First alarm Electro pneumatic regulator alarm
- Other function: In addition to normal operation, constant flow control is also possible. In addition, low pulsation is maintained even during constant flow control.
